FORMATION OF RECTILINEARLY WIDE PLASMAS BY A SLOTTED WAVE-GUIDE UNDERELECTRON-CYCLOTRON-RESONANCE

ISHII S WAKATSUCHI M KATO Y TANI F SUNAGAWA M

S. Ishii et al., FORMATION OF RECTILINEARLY WIDE PLASMAS BY A SLOTTED WAVE-GUIDE UNDERELECTRON-CYCLOTRON-RESONANCE, Review of scientific instruments, 67(3), 1996, pp. 997-999

5

INGLESE

Article

Physics, Applied","Instument & Instrumentation

Review of scientific instruments → ACNP

0034-6748

67

3

1996

2

997 - 999

ISI

0034-6748(1996)67:3<997:FORWPB>2.0.ZU;2-I

A plasma source was developed for ion implanters capable of irradiatin g large-area substrates. Microwave discharge is performed by electron cyclotron resonance (ECR). A rectilinearly wide flux of magnetic induc tion is formed with two long permanent magnets with oppositely facing poles. The ECR zone formed inside a vacuum chamber is elongated in the direction along the pole faces. A waveguide slotted along its E plane is inserted between the magnets. The long slot radiates microwaves in to the vacuum chamber through dielectric materials. These materials pl ay the role of waveguide. Plasmas are uniformly generated in the direc tion along the slotted waveguide when it is terminated with a short pl unger. This mechanism is analyzed by calculating radiation patterns of the slotted waveguide. (C) 1996 American Institute of Physics.