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SUBMICRON PATTERNING OF THIN COBALT FILMS FOR MAGNETIC STORAGE
Authors
NEW RMH
PEASE RFW
WHITE RL
Citation
Rmh. New et al., SUBMICRON PATTERNING OF THIN COBALT FILMS FOR MAGNETIC STORAGE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3196-3201
Citations number
17
Language
INGLESE
art.tipo
Article
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena
→
ACNP
ISSN journal
1071-1023
Volume
12
Issue
6
Year of publication
1994
Pages
3196 - 3201
Database
ISI
SICI code
1071-1023(1994)12:6<3196:SPOTCF>2.0.ZU;2-E