SUBMICRON PATTERNING OF THIN COBALT FILMS FOR MAGNETIC STORAGE

Citation
Rmh. New et al., SUBMICRON PATTERNING OF THIN COBALT FILMS FOR MAGNETIC STORAGE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3196-3201
Citations number
17
Language
INGLESE
art.tipo
Article
Categorie Soggetti
Physics, Applied
ISSN journal
1071-1023
Volume
12
Issue
6
Year of publication
1994
Pages
3196 - 3201
Database
ISI
SICI code
1071-1023(1994)12:6<3196:SPOTCF>2.0.ZU;2-E