SOME ASPECTS OF SEM PROFILOMETRY IN THE B ACKSCATTERING ELECTRON MODE

Citation
Nn. Dreomova et al., SOME ASPECTS OF SEM PROFILOMETRY IN THE B ACKSCATTERING ELECTRON MODE, Izvestia Akademii nauk SSSR. Seria fiziceskaa, 60(2), 1996, pp. 101-104
Citations number
12
Language
RUSSO
art.tipo
Article
Categorie Soggetti
Physics
ISSN journal
0367-6765
Volume
60
Issue
2
Year of publication
1996
Pages
101 - 104
Database
ISI
SICI code
0367-6765(1996)60:2<101:SAOSPI>2.0.ZU;2-T