*Journal of vacuum science & technology. B, Microelectronics and nanometer structures (Online)

<?xml version="1.0" encoding="UTF-8"?>
<collection xmlns="http://www.loc.gov/MARC21/slim">
 <record>
  <leader>02558nas a2200433 a 4500</leader>
  <controlfield tag="001">itacnp2111037</controlfield>
  <controlfield tag="003">IT-ACNP</controlfield>
  <controlfield tag="005">20240125070000.0</controlfield>
  <controlfield tag="007">cr</controlfield>
  <controlfield tag="008">020612d19912009usab1 p           a engco</controlfield>
  <datafield tag="022" ind1=" " ind2=" ">
   <subfield code="a">1520-8567</subfield>
  </datafield>
  <datafield tag="024" ind1="7" ind2=" ">
   <subfield code="a">P 00232447</subfield>
   <subfield code="2">CNR</subfield>
  </datafield>
  <datafield tag="024" ind1="7" ind2=" ">
   <subfield code="a">itacnp2111037</subfield>
   <subfield code="2">IT-ACNP</subfield>
  </datafield>
  <datafield tag="035" ind1=" " ind2=" ">
   <subfield code="a">(ISSN)1520-8567</subfield>
  </datafield>
  <datafield tag="040" ind1=" " ind2=" ">
   <subfield code="a">acnp</subfield>
  </datafield>
  <datafield tag="044" ind1=" " ind2=" ">
   <subfield code="a">usa</subfield>
   <subfield code="c">USA</subfield>
  </datafield>
  <datafield tag="082" ind1=" " ind2=" ">
   <subfield code="a">621</subfield>
  </datafield>
  <datafield tag="210" ind1="0" ind2=" ">
   <subfield code="a">J. VAC. SCI. TECHNOL., B, MICROELECTRON. NANOMETER</subfield>
   <subfield code="z">ONLINE</subfield>
  </datafield>
  <datafield tag="222" ind1=" " ind2="0">
   <subfield code="a">Journal of vacuum science &amp; technology. B, Microelectronics and nanometer structures</subfield>
   <subfield code="b">Online</subfield>
  </datafield>
  <datafield tag="245" ind1="0" ind2="0">
   <subfield code="a">Journal of vacuum science &amp; technology. B, Microelectronics and nanometer structures</subfield>
   <subfield code="s">B</subfield>
  </datafield>
  <datafield tag="246" ind1="0" ind2="3">
   <subfield code="a">Journal of vacuum science and technology.</subfield>
  </datafield>
  <datafield tag="246" ind1="0" ind2="3">
   <subfield code="a"> Microelectronics and nanometer structures</subfield>
  </datafield>
  <datafield tag="246" ind1="0" ind2="3">
   <subfield code="a">Journal of vacuum science and technology.. B. Online</subfield>
  </datafield>
  <datafield tag="246" ind1="0" ind2="3">
   <subfield code="a">Microelectronics and nanometer structures</subfield>
  </datafield>
  <datafield tag="246" ind1="0" ind2="3">
   <subfield code="a">JVST B</subfield>
  </datafield>
  <datafield tag="246" ind1="0" ind2="3">
   <subfield code="a">Issues for 2003- have issue PDF table of contents title: Journal of vacuum science &amp; technology.</subfield>
  </datafield>
  <datafield tag="246" ind1="0" ind2="3">
   <subfield code="a"> An international journal devoted to microelectronics and nanometer structures. Processing</subfield>
  </datafield>
  <datafield tag="246" ind1="0" ind2="3">
   <subfield code="a"> measurement</subfield>
  </datafield>
  <datafield tag="246" ind1="0" ind2="3">
   <subfield code="a"> and phenomena</subfield>
  </datafield>
  <datafield tag="260" ind1=" " ind2=" ">
   <subfield code="a">Woodbury, N.Y.</subfield>
   <subfield code="b">Published for the American Vacuum Society by the American Institute of Physics</subfield>
  </datafield>
  <datafield tag="264" ind1=" " ind2="2">
   <subfield code="c">Data export is allowed to ACNP participating libraries for institutional purposes and to individuals for personal, non-commercial uses only. Please contact the Bologna University ACNP Team ( acnp.sba.unibo.it/chi-siamo/staff-acnp ) to request permission to use exported data outside the scope of the above license, including but not limited to republication to a group or republishing the website or parts of the website.</subfield>
  </datafield>
  <datafield tag="264" ind1=" " ind2="4">
   <subfield code="b">Università di Bologna</subfield>
   <subfield code="c">copyright2024</subfield>
  </datafield>
  <datafield tag="541" ind1=" " ind2=" ">
   <subfield code="a">issn</subfield>
   <subfield code="e">1615657</subfield>
  </datafield>
  <datafield tag="710" ind1="0" ind2=" ">
   <subfield code="a">American Vacuum Society American Institute of Physics</subfield>
  </datafield>
  <datafield tag="776" ind1="1" ind2=" ">
   <subfield code="t">Journal of vacuum science &amp; technology. B, Microelectronics and nanometer structures</subfield>
   <subfield code="w">923932</subfield>
   <subfield code="x">1071-1023</subfield>
  </datafield>
  <datafield tag="785" ind1="1" ind2="0">
   <subfield code="t">Journal of vacuum science and technology. B, Nanotechnology &amp; microelectronics (Online)</subfield>
   <subfield code="w">2981804</subfield>
   <subfield code="x">2166-2754</subfield>
  </datafield>
  <datafield tag="856" ind1="4" ind2="0">
   <subfield code="u">http://scitation.aip.org/content/avs/journal/jvstb/browse'; 'http://ieeexplore.ieee.org/xpl/RecentIssue.jsp?punumber=4915583</subfield>
  </datafield>
  <datafield tag="856" ind1="4" ind2="0">
   <subfield code="a">acnp.unibo.it</subfield>
   <subfield code="n">ACNP Italian Union Catalogue of Serials</subfield>
   <subfield code="u">https://acnpsearch.unibo.it/journal/2111037</subfield>
  </datafield>
  <datafield tag="856" ind1="4" ind2="0">
   <subfield code="a">acnp.sba.unibo.it/</subfield>
   <subfield code="n">ABIS Area Biblioteche e Servizi allo Studio - Università di Bologna</subfield>
   <subfield code="m">acnp.support@unibo.it</subfield>
   <subfield code="u">https://acnp.sba.unibo.it</subfield>
  </datafield>
 </record>
</collection>