*Journal of vacuum science & technology. B, Microelectronics and nanometer structures

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       _2IT-ACNP
030    _aJVSTBM
035    _a(ISSN)1071-1023
040    _aacnp
044    _ausa
       _cUSA
082    _a621.381/05
210 0  _aJ. VAC. SCI. TECHNOL., B, MICROELECTRON. NANOMETER
222  0 _aJournal of vacuum science & technology. B, Microelectronics and nanometer structures
245 00 _aJournal of vacuum science & technology. B, Microelectronics and nanometer structures
       _sB
246 00 _aMicroelectronics and nanometer structures
246 03 _aJournal of vacuum science & technology.
246 03 _a International journal devoted to microelectronics and nanometer structures
246 03 _aJournal of vacuum science and technology.
246 03 _a Microelectronics and nanometer structures
246 03 _aJVST B
260    _aNew York
       _bPublished for the Society by the American Institute of Physics
264  2 _cData export is allowed to ACNP participating libraries for institutional purposes and to individuals for personal, non-commercial uses only. Please contact the Bologna University ACNP Team ( www.biblioteche.unibo.it/acnp/staff-e-contatti ) to request permission to use exported data outside the scope of the above license, including but not limited to republication to a group or republishing the website or parts of the website.
264  4 _bUniversità di Bologna
       _ccopyright2020
541    _aissn
       _e1615658
710 0  _aAmerican Vacuum Society American Institute of Physics
780 1  _tJournal of vacuum science & technology. B, Microelectronics processing and phenomena
       _t53908
       _x0734-211X
776 1  _tJournal of vacuum science & technology. B, Microelectronics and nanometer structures (Online)
       _t2111037
       _x1520-8567
785 10 _tJournal of vacuum science and technology. B, Nanotechnology & microelectronics (Print)
       _t2865690
       _x2166-2746
856 40 _uhttp://ieeexplore.ieee.org/servlet/opac?punumber=4915583'; 'http://scitation.aip.org/jvstb
856 40 _aacnp.unibo.it
       _nACNP Italian Union Catalogue of Serials
       _uhttps://acnpsearch.unibo.it/journal/923932
856 40 _abiblioteche.unibo.it
       _nASDD Area Sistemi Dipartimentali e Documentali - Università di Bologna
       _macnp.support@unibo.it
       _uhttp://biblioteche.unibo.it