Alternative title: Journal of vacuum science and technology., Microelectronics processing and phenomena","Microelectronics processing and phenomena
Corp./Body Author: American Vacuum Society American Institute of Physics
ISSN: 0734-211X
ISSN-L: 0734-211X
Cumulative holding: 1983-1990.

Alternative title: Journal of vacuum science and technology., Microelectronics and nanometer structures","Journal of vacuum science and technology.. B. Online","Microelectronics and nanometer structures","JVST B","Issues for 2003- have issue PDF table of contents title: Journal of vacuum science & technology., An international journal devoted to microelectronics and nanometer structures. Processing, measurement, and phenomena
Corp./Body Author: American Vacuum Society American Institute of Physics
ISSN: 1520-8567
ISSN-L: 1071-1023
Cumulative holding: 1983-2010;

Alternative title: Nanotechnology & microelectronics","JVST B, Nanotechnology & microelectronics","Nanotechnology and microelectronics","Journal of vacuum science and technology., International journal devoted to microelectronics and nanometer structures","Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Corp./Body Author: American Vacuum Society American Institute of Physics
ISSN: 2166-2746
ISSN-L: 2166-2746
Cumulative holding: 2010-2015;