Corp./Body Author: American Vacuum Society American Institute of Physics
ISSN: 0022-5355
ISSN-L: 0022-5355
Cumulative holding: 1964-1982.

Alternative title: Journal of vacuum science and technology., Vacuum, surfaces, and films","Journal of vacuum science & technology.. A","Vacuum, surfaces, and films","JVST A","Journal of vacuum science & technology., An international journal devoted to vacuum, surfaces, and films
Corp./Body Author: American Vacuum Society American Institute of Physics
ISSN: 1520-8559
ISSN-L: 0734-2101
Cumulative holding: 1983-