Results: 1-9 |
Results: 9

Authors: Ito, N Moriya, T Uesugi, F Moriya, S Aomori, M Kato, Y
Citation: N. Ito et al., The application of in situ monitor of extremely rarefied particle clouds grown thermally above wafers by using laser light scattering method to the development of the mass-production condition of the tungsten thermal chemical vapor deposition, J VAC SCI A, 19(4), 2001, pp. 1248-1254

Authors: Uesugi, F Tanaka, Y Horio, Y
Citation: F. Uesugi et al., Influences of nonideal characteristics of A-D converter on estimation of the Lyapunov exponent of one-dimensional discrete-time dynamical systems, ELEC C JP 3, 83(10), 2000, pp. 74-81

Authors: Moriya, T Ito, N Uesugi, F Hayashi, Y Okamura, K
Citation: T. Moriya et al., Generation of positively charged particles at an anode and transport to device wafers in a real radio frequency plasma etching chamber for tungsten etch-back process, J VAC SCI A, 18(4), 2000, pp. 1282-1286

Authors: Ito, N Moriya, T Uesugi, F Hayashi, Y Okamura, K
Citation: N. Ito et al., The charge and behavior of flaked particles in tungsten dry etching equipment examined by using particle radar, NEC RES DEV, 41(4), 2000, pp. 341-345

Authors: Shinzawa, T Uesugi, F Nishiyama, I Sugai, K Kishida, S Okabayashi, H
Citation: T. Shinzawa et al., New molecular compound precursor for aluminum chemical vapor deposition, APPL ORGAN, 14(1), 2000, pp. 14-24

Authors: Uesugi, F Kikuchi, Y Watanabe, K Hashimoto, I
Citation: F. Uesugi et al., Measurement of local lattice parameter in ion-implanted silicon using HOLZlines, PHYS ST S-A, 177(2), 2000, pp. 331-339

Authors: Hara, S Yamazaki, T Uesugi, F Watanabe, K Hashimoto, I
Citation: S. Hara et al., A new method for dynamical HOLZ calculations, J ELEC MICR, 49(1), 2000, pp. 53-59

Authors: Ito, N Moriya, T Uesugi, F Doi, H Sakamoto, S Hayashi, Y
Citation: N. Ito et al., Observation of the trajectories of particles in process equipment by an insitu monitoring system using a laser light scattering method, J VAC SCI B, 16(6), 1998, pp. 3339-3343

Authors: Inada, T Uesugi, F Kawachi, S Inada, K
Citation: T. Inada et al., The tracheal tube with a high-volume, low-pressure cuff at various airway inflation pressures, EUR J ANAES, 15(6), 1998, pp. 629-632
Risultati: 1-9 |