Results: 1-2 |
Results: 2

Authors: Sreenivasan, R Gougousi, T Xu, YH Kidder, J Zafiriou, E Rubloff, GW
Citation: R. Sreenivasan et al., Run to run control in tungsten chemical vapor deposition using H-2/WF6 at low pressures, J VAC SCI B, 19(5), 2001, pp. 1931-1941

Authors: Ben-Arieh, D Sreenivasan, R
Citation: D. Ben-arieh et R. Sreenivasan, Information analysis in a distributed dynamic group technology method, INT J PRO E, 60-1, 1999, pp. 427-432
Risultati: 1-2 |