Results: 1-14 |
Results: 14

Authors: Zimmermann, B Lucklum, R Hauptmann, P Rabe, J Buttgenbach, S
Citation: B. Zimmermann et al., Electrical characterisation of high-frequency thickness-shear-mode resonators by impedance analysis, SENS ACTU-B, 76(1-3), 2001, pp. 47-57

Authors: Herrmann, F Weihnacht, M Buttgenbach, S
Citation: F. Herrmann et al., Properties of sensors based on shear-horizontal surface acoustic waves in LiTaO3/SiO2 and quartz/SiO2 structures, IEEE ULTRAS, 48(1), 2001, pp. 268-273

Authors: Rudnitskaya, A Ehlert, A Legin, A Vlasov, Y Buttgenbach, S
Citation: A. Rudnitskaya et al., Multisensor system on the basis of an array of non-specific chemical sensors and artificial neural networks for determination of inorganic pollutantsin a model groundwater, TALANTA, 55(2), 2001, pp. 425-431

Authors: Butefisch, S Schoft, A Buttgenbach, S
Citation: S. Butefisch et al., Three-axes monolithic silicon low-g accelerometer, J MICROEL S, 9(4), 2000, pp. 551-556

Authors: Ohnmacht, M Seidemann, V Buttgenbach, S
Citation: M. Ohnmacht et al., Microcoils and microrelays - an optimized multilayer fabrication process, SENS ACTU-A, 83(1-3), 2000, pp. 124-129

Authors: Steffensen, L Than, O Buttgenbach, S
Citation: L. Steffensen et al., BICEPS: a modular environment for the design of micromachined silicon devices, SENS ACTU-A, 79(1), 2000, pp. 76-81

Authors: Herrmann, F Hahn, D Buttgenbach, S
Citation: F. Herrmann et al., Separate determination of liquid density and viscosity with sagittally corrugated Love-mode sensors, SENS ACTU-A, 78(2-3), 1999, pp. 99-107

Authors: Dauer, S Ehlert, A Buttgenbach, S
Citation: S. Dauer et al., Rapid prototyping of micromechanical devices using a Q-switched Nd : YAG laser with optional frequency doubling, SENS ACTU-A, 76(1-3), 1999, pp. 381-385

Authors: Buttgenbach, S
Citation: S. Buttgenbach, Microsensors and microsystems: Innovative applications and innovative technology, TEC MES, 66(5), 1999, pp. 175-175

Authors: Butefisch, S Buttgenbach, S
Citation: S. Butefisch et S. Buttgenbach, Silicon three-axial tactile force sensor, TEC MES, 66(5), 1999, pp. 185-190

Authors: Kleine-Besten, T Loheide, S Brand, U Schlachetzki, A Butefisch, S Buttgenbach, S
Citation: T. Kleine-besten et al., 3D probe for dimensional metrology on microsystem components, TEC MES, 66(12), 1999, pp. 490-495

Authors: Herrmann, F Weihnacht, M Buttgenbach, S
Citation: F. Herrmann et al., Properties of shear-horizontal surface acoustic waves in different layeredquartz-SiO2 structures, ULTRASONICS, 37(5), 1999, pp. 335-341

Authors: Herrmann, F Hahn, D Buttgenbach, S
Citation: F. Herrmann et al., Separation of density and viscosity influence on liquid-loaded surface acoustic wave devices, APPL PHYS L, 74(22), 1999, pp. 3410-3412

Authors: Herrmann, F Buttgenbach, S
Citation: F. Herrmann et S. Buttgenbach, Temperature-compensated shear-horizontal surface acoustic waves in layeredquartz/SiO2-Structures, PHYS ST S-A, 170(2), 1998, pp. R3-R4
Risultati: 1-14 |