Results: 1-25 | 26-50 | 51-75 | 76-100 | >>
Results: 1-25/529

Authors: KIM TS KIM DJ LEE JK JUNG HJ
Citation: Ts. Kim et al., FABRICATION OF EXCESS PBO-DOPED PB(ZR0.52TI0.48)O-3 THIN-FILMS USING RADIO-FREQUENCY MAGNETRON SPUTTERING METHOD, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(6), 1997, pp. 2831-2835

Authors: JELENKOVIC EV TONG KY SUN Z MAK CL CHEUNG WY
Citation: Ev. Jelenkovic et al., PROPERTIES OF CRYSTALLIZED SI1-XGEX THIN-FILMS DEPOSITED BY SPUTTERING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(6), 1997, pp. 2836-2841

Authors: ZHANG QC
Citation: Qc. Zhang, DIRECT-CURRENT MAGNETRON-SPUTTERED W-AIN CERMET SOLAR-ABSORBER FILMS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(6), 1997, pp. 2842-2846

Authors: SMY T TAN L WINTERTON SS DEW SK BRETT MJ
Citation: T. Smy et al., SIMULATION OF SPUTTER-DEPOSITION AT HIGH-PRESSURES, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(6), 1997, pp. 2847-2853

Authors: QUIGLEY PG RAO RA EOM CB
Citation: Pg. Quigley et al., TIME-DEPENDENCE AND SPATIAL-DISTRIBUTION OF THE DEPOSITION RATE OF YBA2CU3O7 THIN-FILMS IN 90-DEGREES OFF-AXIS SPUTTERING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(6), 1997, pp. 2854-2858

Authors: TSUDA O TATEBAYASHI Y YAMADATAKAMURA Y YOSHIDA T
Citation: O. Tsuda et al., MASS AND ENERGY MEASUREMENTS OF THE SPECIES RESPONSIBLE FOR CBN GROWTH IN RF BIAS SPUTTER CONDITIONS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(6), 1997, pp. 2859-2863

Authors: SHAMRAI KP VIRKO VF BLOM HO PAVLENKO VP TARANOV VB JONSSON LB HEDLUND C BERG S
Citation: Kp. Shamrai et al., DISCHARGE DISRUPTIONS IN A HELICON PLASMA SOURCE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(6), 1997, pp. 2864-2874

Authors: MALIK SM FETHERSTON RP CONRAD JR
Citation: Sm. Malik et al., DEVELOPMENT OF AN ENERGETIC ION-ASSISTED MIXING AND DEPOSITION PROCESS FOR TINX AND DIAMOND-LIKE CARBON-FILMS, USING A COAXIAL GEOMETRY IN PLASMA SOURCE ION-IMPLANTATION, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(6), 1997, pp. 2875-2879

Authors: DEN S KUNO T ITO M HORI M GOTO T OKEEFFE P HAYASHI Y SAKAMOTO Y
Citation: S. Den et al., INFLUENCE ON SELECTIVE SIO2 SI ETCHING OF CARBON-ATOMS PRODUCED BY CH4 ADDITION TO A C4F8 PERMANENT-MAGNET ELECTRON-CYCLOTRON-RESONANCE ETCHING PLASMA/, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(6), 1997, pp. 2880-2884

Authors: TYNAN GR BAILEY AD CAMPBELL GA CHARATAN R DECHAMBRIER A GIBSON G HEMKER DJ JONES K KUTHI A LEE C SHOJI T WILCOXSON M
Citation: Gr. Tynan et al., CHARACTERIZATION OF AN AZIMUTHALLY SYMMETRICAL HELICON WAVE HIGH-DENSITY PLASMA SOURCE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(6), 1997, pp. 2885-2892

Authors: HAN SM AYDIL ES
Citation: Sm. Han et Es. Aydil, STRUCTURE AND CHEMICAL-COMPOSITION OF FLUORINATED SIO2-FILMS DEPOSITED USING SIF4 O-2 PLASMAS/, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(6), 1997, pp. 2893-2904

Authors: MALDONADO A OLVERA MD ASOMOZA R ZIRONI EP CANETASORTEGA J PALACIOSGOMEZ J
Citation: A. Maldonado et al., CHARACTERISTICS OF SPRAY PYROLYTIC ZNO-IN THIN-FILMS GROWN FROM ZINC ACETATE AND INDIUM NITRATE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(6), 1997, pp. 2905-2907

Authors: YOSHIMARU M KOIZUMI S SHIMOKAWA K
Citation: M. Yoshimaru et al., STRUCTURE OF FLUORINE-DOPED SILICON-OXIDE FILMS DEPOSITED BY PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(6), 1997, pp. 2908-2914

Authors: YOSHIMARU M KOIZUMI S SHIMOKAWA K
Citation: M. Yoshimaru et al., INTERACTION BETWEEN WATER AND FLUORINE-DOPED SILICON-OXIDE FILMS DEPOSITED BY PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(6), 1997, pp. 2915-2922

Authors: MAUSBACH M
Citation: M. Mausbach, PARAMETRIZATION OF THE LAFRAMBOISE THEORY FOR CYLINDRICAL LANGMUIR PROBE ANALYSIS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(6), 1997, pp. 2923-2929

Authors: ROTH WC CARLILE RN OHANLON JF
Citation: Wc. Roth et al., ELECTRICAL CHARACTERIZATION OF A PROCESSING PLASMA CHAMBER, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(6), 1997, pp. 2930-2937

Authors: WULFF H EGGS C
Citation: H. Wulff et C. Eggs, INVESTIGATION OF STORED ENERGY IN PLASMA-DEPOSITED TINX FILMS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(6), 1997, pp. 2938-2944

Authors: KATIYAR RS MENG JF RAI BK
Citation: Rs. Katiyar et al., EFFECT OF GRAIN-SIZE AND PB DOPANT ON LUMINESCENCE IN BATIO3, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(6), 1997, pp. 2945-2948

Authors: WALLEN E
Citation: E. Wallen, EXPERIMENTAL TEST OF THE PROPAGATION OF A HE PRESSURE FRONT IN A LONG, CRYOGENICALLY COOLED TUBE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(6), 1997, pp. 2949-2958

Authors: CHANG JP ZHANG Z XU H SAWIN HH BUTTERBAUGH JW
Citation: Jp. Chang et al., TRANSITION-METAL CLEANING USING THERMAL BEAMS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(6), 1997, pp. 2959-2967

Authors: BROGUEIRA P CHU V FERRO AC CONDE JP
Citation: P. Brogueira et al., DOPING OF AMORPHOUS AND MICROCRYSTALLINE SILICON FILMS DEPOSITED BY HOT-WIRE CHEMICAL-VAPOR-DEPOSITION USING PHOSPHINE AND TRIMETHYLBORON, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(6), 1997, pp. 2968-2982

Authors: HARTMANN J SIEMROTH P SCHULTRICH B RAUSCHENBACH B
Citation: J. Hartmann et al., CHARACTERIZATION OF CARBON NITRIDE PRODUCED BY HIGH-CURRENT VACUUM-ARC DEPOSITION, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(6), 1997, pp. 2983-2987

Authors: WOO HK LEE ST LEE CS BELLO I LAM YW
Citation: Hk. Woo et al., DIAMOND FILMS GROWN BY HOT-FILAMENT CHEMICAL-VAPOR-DEPOSITION FROM A SOLID CARBON SOURCE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(6), 1997, pp. 2988-2992

Authors: YUN SJ LEE KH SKARP J KIM HR NAM KS
Citation: Sj. Yun et al., DEPENDENCE OF ATOMIC LAYER-DEPOSITED AL2O3 FILMS CHARACTERISTICS ON GROWTH TEMPERATURE AND AL PRECURSORS OF AL(CH3)(3) AND ALCL3, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(6), 1997, pp. 2993-2997

Authors: BAILEY WH RAHMAN TS STRONGIN M DAVENPORT JW
Citation: Wh. Bailey et al., KINETICS OF ADSORPTION AND PHOTODESORPTION OF HYDROGEN ON COPPER SURFACES, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(6), 1997, pp. 2998-3004
Risultati: 1-25 | 26-50 | 51-75 | 76-100 | >>