Journal of vacuum science & technology. B, Microelectronics processing and phenomena

Other titles
Journal of vacuum science and technology., Microelectronics processing and phenomena; Microelectronics processing and phenomena
Corp./Body Author
American Vacuum Society American Institute of Physics
Publisher
Published for the Society by the American Institute of Physics
Place of publication
New York, N.Y.
From year - To year
1983-1990
Type of resource
Periodical
Frequency
Bimonthly
Language
English
Country of publication
United States
ISSN
0734-211X
ISSN-L
0734-211X
Codice Dewey code
621.5/5/05
Journal code
P 00081058
Database
acnp
Medium
Printed text
Acnp cumulative hol.
1983-1990.
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