Journal of vacuum science & technology. B, Microelectronics and nanometer structures (Online)

Other titles
Journal of vacuum science and technology., Microelectronics and nanometer structures; Journal of vacuum science and technology.. B. Online; Microelectronics and nanometer structures; JVST B; Issues for 2003- have issue PDF table of contents title: Journal of vacuum science & technology., An international journal devoted to microelectronics and nanometer structures. Processing, measurement, and phenomena
Corp./Body Author
American Vacuum Society American Institute of Physics
Publisher
Published for the American Vacuum Society by the American Institute of Physics
Place of publication
Woodbury, N.Y.
From year - To year
1991-2009
Type of resource
Periodical
Frequency
Bimonthly
Language
English
Country of publication
United States
ISSN
1520-8567
ISSN-L
1071-1023
Codice Dewey code
621
Journal code
P 00232447
Database
acnp
Medium
On-line (remote)
Acnp cumulative hol.
1983-2010;
Full Text